Substrate coating assembly using a sputtering device,申请号EP19970102047-传众专利搜索

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发明名称	Substrate coating assembly using a sputtering device
摘要	<p>Die Erfindung betrifft eine Zerstäubungsvorrichtung für reaktive Beschichtungen von Substraten, wobei die der Zerstäubungselektrode zugeführte elektrische Leistung zwischen zwei Werten pendelt. Die beiden Leistungswerte werden dabei so ausgewählt, daß sich bei gleichem Reaktivgaszufluß das Target der Zerstäubungselektrode beim ersten Leistungswert im metallischen Mode befindet, während es sich beim zweiten Leistungswert im oxidischen Mode befindet.</p>
申请公布号	EP0795890(A2)	申请公布日期	1997.09.17
申请号	EP19970102047	申请日期	1997.02.10
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AKTIENGESELLSCHAFT	发明人	SZCZYRBOWSKI, JOACHIM, DR. DIPL.-PHYS.;TESCHNER, GOETZ, DIPL.-ING.;ZMELTY, ANTON, DIPL.-ING.;BRUCH, JUERGEN, DIPL.-ING.;MARQUARDT, DIETMAR
分类号	C23C14/34;C23C14/00;C23F4/00;H01J37/305;H01J37/34;H01L21/203;H01L21/285;H01L21/302;(IPC1-7):H01J37/34;C23C16/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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