| 摘要 |
<p>PROBLEM TO BE SOLVED: To compensate the displacement to the behavior of the base of the on board article against the base with highly accurate following ability by feeding back the value obtained by multiplying the detected acceleration signal by conversion factor to a control means together with the deviated value. SOLUTION: This device has a servo system wherein the value detected by a Z axis detection means 105 is fed back to a linear motor controller 25, and a gate stage follows to the Z displacement of the XY movable stage corresponding to the Z displacement of a base. In addition, the value obtained by multiplying the acceleration signal of the XY movable stage in the Z direction, which is detected by an accelerometer 101, by a conversion factor 102 by means of a multiplier 103 is fed back to the linear motor controller 25. The following ability of the servo system in a limited servo gain can be improved by feeding back the acceleration of the base.</p> |
