SEMICONDUCTOR WAFER, AND PROCESS FOR PRODUCTION THEREOF,申请号EP19930101415-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER, AND PROCESS FOR PRODUCTION THEREOF
摘要
申请公布号	EP0553854(A3)	申请公布日期	1997.09.10
申请号	EP19930101415	申请日期	1993.01.29
申请人	CANON KABUSHIKI KAISHA	发明人	MIYAWAKI, MAMORU
分类号	H01L21/02;H01L21/20;H01L21/304;H01L21/306;H01L21/762;H01L27/12;(IPC1-7):H01L21/20;H01L21/76;H01L21/82	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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