| 摘要 |
<p>PURPOSE:To enable a platelike substance to be surely detected even when supporting pins go up and down by providing a detection means to detect presence of the platelike substance on the supporting pins able to project while transferring the platelike substance. CONSTITUTION:An alignment stage is so constituted that a wafer 1 transferred from a pincette may be supported with supporting pins 14 composed of three pins. The supporting pins 14 is composed of supporting tubes 19 and a fiber sensor 20. Luminous beams 24 emitted from the tips of fibers 20a in the supporting tubes 19 reach the back 1a of the wafer 1 to be reflected on the rear 1a. This reflection beam 25 passes through the center axis of the fiber 20a is to return to the side of a receiving element 27. This device can be applied to the devices of a wafer positioning device, a wafer resist application device, a developer application device, a wafer prober and an LCD prober.</p> |
