| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of exchanging a gas cylinders so as to improve work efficiency for allowing prevention of the drop in accuracy of a laser abrasion process by constituting a dilusion gas of a gas for ultraviolet laser oscillation only of a neon gas. SOLUTION: F2 gas is enclosed in a cylinder 1 in the state of being diluted with Ne gas and Ne gas is enclosed in a cylinder 2 and Kr gas is enclosed in a cylinder 3. When open/close valves 1a, 2a, 3a of respective cylinders 1, 2, 3 are opened, prescribed amounts of gases are supplied from respective pipings 4, 5, 6 are supplied from respective pipings 4, 5, 6 inside a mixing holder 8. Ne-diluted KrF gas of a prescribed constitution is formed inside the mixing holder 8 for being stored in a constitutionally stable state. The Ne-diluted KrF gas thus manufactured is subdivided into cylinders for being used as laser gases of an ultraviolet laser oscillator 10. The Ne-diluted KrF gas han an extremely little drop in a laser output accompanying a lapse of oscillation time so as to produce no ill effect on processing accuracy. |
