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发明名称
TABURETSUTONOSEIZOSOCHI
摘要
申请公布号
JP2649577(B2)
申请公布日期
1997.09.03
申请号
JP19890139500
申请日期
1989.06.01
申请人
HITACHI SEISAKUSHO KK
发明人
SAKAMOTO TOMOO;KANEDA AIZO;SAEKI JUNICHI
分类号
H01L21/56;B29B9/06;B29B9/08;(IPC1-7):B29B9/08
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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