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发明名称
DEVICE FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPH09227277(A)
申请公布日期
1997.09.02
申请号
JP19960061699
申请日期
1996.02.23
申请人
SUMITOMO SITIX CORP
发明人
MAEDA TOKUJI
分类号
G01J5/00;C30B15/14;C30B15/20;C30B29/06;H01L21/208;(IPC1-7):C30B15/14
主分类号
G01J5/00
代理机构
代理人
主权项
地址
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