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发明名称
SUPATSUTASOCHI
摘要
申请公布号
JP2646260(B2)
申请公布日期
1997.08.27
申请号
JP19890074566
申请日期
1989.03.27
申请人
TOKYO EREKUTORON KK
发明人
WADA JUICHI;KATSUKI JIRO
分类号
C23C14/35;H01L21/285;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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