SURFACE ROUGHNESS MEASURING APPARATUS AND METHOD

摘要

An image of an object surface (3) is formed on an optical axis (7) which is inclined by a predetermined angle theta with respect to the normal (5) of the object surface (3), and this optical image is converted to electrical image data. The roughness of the object surface is determined on the basis of a positional change in the direction of inclination of a contrast in these image data as well as the predetermined angle.