| 摘要 |
PROBLEM TO BE SOLVED: To remove therefrom organic contaminants stuck on an object to be processed, by utilizing effectively ozone. SOLUTION: Holding on a mount stage 31 of a holding means 30 an LCD (liquid crystal display) substrate (G) with stuck organic contaminants thereon, a processing chamber 21 for storing both the LCD substrate G and the mount stage 31 therein is interrupted from the outside air. Thereafter, the mount stage 31 is moved to an ultraviolet-ray projecting position present on the side of an ultraviolet-ray lamp 22. Then, opening a lamp shutter 25, the ozone generated by the ultraviolet-ray projection from the ultraviolet lamp 22 is projected on the LCD substrate G to decompose and remove organic contaminants stuck on the LCD substrate G. Also, while the ozone present, in the processing chamber 21 is exhausted to the outside by a first exhaust means 41 in the course of the projection of the foregoing ozone, the ozone generated in a lamp room 23 is exhausted to the outside by a second exhaust means in the state of the closing of the lamp shutter 25. |
