| 摘要 |
<p>PURPOSE:To obtain highly purified inert gas ensured to be freed from impurities, using a system comprising a process to convert the impurities contained into carbon dioxide and water, a scavenging process for e.g., oxygen, and adsorbent beds highly adsorptive for carbon dioxide. CONSTITUTION:A reaction cylinder 1 is provided which is packed with a catalyst for converting impurities in an inert gas to be purified (i.e., hydrocarbons, carbon monoxide, oxygen and hydrogen) into carbon dioxide and water. This reaction cylinder 1 is then heated by a heater H followed by introducing a raw material inert gas 4 containing impurities into this cylinder 1 to convert the impurities into carbon dioxide and water. The resultant inert gas is then cooled by a cooler C and introduced into one of purifying cylinders A and B to be used alternately to be brought into contact with a catalyst bed 8 for scavenging the oxygen to catch the residual oxygen, etc. The resultant inert gas is then brought into contact with a second adsorbent bed 9 for removing the carbon dioxide to eliminate the carbon dioxide followed by contact with a third adsorbent bed 10 to eliminate the moisture, thus obtaining the objective high-purity inert gas 14.</p> |
