| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an XY stage which is suited when inspecting a fine pattern formed on the surface of an object to be inspected on a large flat plate using transmission light. SOLUTION: An XY stage has a surface plate 1, a Y stage 3 which can travel in the direction of Y axis on the surface plate 1, and an XY stage 4 which can travel in the direction of X axis on the Y stage and a pattern formed on the surface of an object 50 to be inspected is inspected using a pair of inspection equipment 8 and 9 arranged at the surface and rear sides of the flat-plate- shaped object 50 to be inspected. Then, the X stage 4 is constituted of rectangular frame shapes 5a, 5b, 6, and 7 and has a function for retaining the object 50 to be inspected at its peripheral part. In the Y stage 3, a slitshaped opening 10 in parallel with the Y axis is formed near the center and at the same time a number of air emission holes 12 are provided on the upper surface and compressed air is blown from the air emission holes 12, thus floating the object 50 to be inspected on the Y stage 3.</p> |
