CALIBRATION UNIT FOR OUTLINE OF SEMICONDUCTOR PACKAGE

摘要

PROBLEM TO BE SOLVED: To correctly calibrate a semiconductor package, by providing a plurality of leg parts which are integrally formed in a single body of a rectangular block while spaced a distance unrelated to any specific semiconductor device. SOLUTION: A calibration unit 11 is a rectangular metallic block of a single body having some mechanically worked leg parts 12 in the periphery. The leg parts 12 extend outside from calibration side faces representing surface of semiconductor devices and are separated a distance unrelated to any specific semiconductor device. An actual time reference device 9 is located 50mm closer to a camera 50 than leads ion the unit 11 when the unit 11 is loaded onto a mounting plate 8. An image system scans the reference device 9, confirming a position of an opening 9a. The position if the opening 9a can be confirmed by searching for a position where white is changed to block in an image. The mounting plate 8 can rotate. Side faces 8a-8b rotate to an image path of the camera, so that one of the side faces of the unit 11 is directed to the camera.