发明名称 |
TiSi2/TiN clad interconnect technology |
摘要 |
A TiSi2/TiN clad LI strap process and structure are disclosed which combine the advantages of both TiSi2 and TiN LI processes. According to the invention, the retention of a thin TiN layer between the local interconnect and contacts provides a diffusion barrier against counterdoping and relaxes the thermal budget for subsequent processing.
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申请公布号 |
US5654575(A) |
申请公布日期 |
1997.08.05 |
申请号 |
US19950478571 |
申请日期 |
1995.06.07 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
JENG, SHIN-PUU |
分类号 |
H01L21/768;H01L23/532;(IPC1-7):H01L29/76;H01L23/48;H01L29/12 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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