| 摘要 |
PROBLEM TO BE SOLVED: To previously detect troubles of a feed mechanism and enable preventing breakdown of a wafer, by arranging sensors measuring travel distance of an arm of a three-shaft robot, rotary encorders counting the number of revolutions of drive source mechanisms and a comparator comparing the number of revolutions from the sensors and from the rotary encorders. SOLUTION: This transfer equipment is provided with a three-shaft robot 7 which retains and transfers a wafer 17, drive source mechanisms 12a-12c which rotate rotary shafts for travel in the three-shaft directions, and torque limiters 11a-11c which transmit the torque of the drive source mechanisms to the rotary shafts and have joints which slip when the rotary shafts are over- loaded. In the above wafer transfer equipment, sensors 2a-2c measuring travel distance of an arm 8 of the three-shaft robot 7 and rotary encorders 3a-3c counting the number of revolutions of the drive source mechanisms 12a-12c are installed. A comparator 6 which compares the converted value of travel distance to the number of revolutions of the rotary shafts with the number of revolutions of the rotary encorders 3a-3c is also installed. |
