| 摘要 |
PURPOSE:To efficiently remove SiH4 by bringing a hydroxide aq. solution of alkali metal or alkaline earth metal with the suspension of an oxidation catalyst consisting of Fe2O3, SnO2, Bi2O3, MnO2 and Cu2O into gas-liquid contact with SiH4. CONSTITUTION:The gas incorporating SiH4 is brought into gas-liquid contact with a hydroxide aq. solution of alkali metal or alkaline earth metal such as NaOH and Ca(OH)2 with the suspension of an oxidation catalyst consisting of Fe2O3, SnO2, Bi2O3, MnO2 and Cu2O and the reaction of both SiH4 and the alkali aq. soln. is promoted effect of the catalyst. In such a way, SiH4 is efficiently removed from the gas. |
