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发明名称
HANDOTAIKETSUSHOMAKUNOSEICHOHOHOOYOBISOCHI
摘要
申请公布号
JP2632239(B2)
申请公布日期
1997.07.23
申请号
JP19900296897
申请日期
1990.10.31
申请人
NICHIA KAGAKU KOGYO KK
发明人
NAKAMURA SHUJI
分类号
C30B25/16;C30B29/38;H01L21/205;(IPC1-7):C30B25/16
主分类号
C30B25/16
代理机构
代理人
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