Raster scan force microscope with mechanical coarse setting also sensor and evaluator

摘要

The microscope has a sensor (4) and an evaluation unit for determining the influences acting on the sensor, which are produced by an interaction between the sensor and a specimen (1), with a relative movement between the sensor and a surface of the specimen. A vacuum chamber is provided, surrounding the specimen and the sensor. A mechanical system activates a coarse approach of the specimen surface (2) to the sensor to a distance in a range of 500 nm to 100 nm. The system is arranged in the vacuum chamber. The system for the coarse approach has a beam (13) swivelable about a pivot (14). The specimen is secured on the beam, and across a control, one end of the beam with the specimen, is swivelable in the direction of the sensor. The beam is moved by a drive system including a gearing (17) and a stepper motor (16). The fine approach system includes a piezo-adjusting element.