发明名称 APPARATUS FOR MEASURING WEIGHT OF PULLED UP CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a load cell for sensing the pulled up weight with a simple and inexpensive constitution and improve the measurement accuracy in a cable type machine for pulling up a single crystal. SOLUTION: This apparatus for measuring the weight of a pulled up crystal is obtained by installing a guide pulley 10, supported by a load plate 12 and used for changing the direction of a cable 1 by 180 deg. and a winding drum 8, fixed to a base plate 5 and capable of winding the cable 1 and simultaneously supporting the load plate 12 under an applied load on plural load cells 7,... for small loads, dispersing the load and measuring the dispersed loads in a machine for pulling the single crystal designed to pull up the grown single crystal 4 with the cable 1.
申请公布号 JPH09175893(A) 申请公布日期 1997.07.08
申请号 JP19950350040 申请日期 1995.12.25
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 MIZUISHI KOJI
分类号 G01G3/12;C30B15/28;C30B15/30;G01G19/18;H01L21/208;(IPC1-7):C30B15/28 主分类号 G01G3/12
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