| 摘要 |
PROBLEM TO BE SOLVED: To improve polishing efficiency by applying prescribed rotation to a disk. SOLUTION: A pair of rotatable and ascendable-descendable upper surface plates 11 and 12 having a ring-shaped polishing pad around an under surface, are journalled to an arm 4, and a pair of rotatable lower surface plates 18 and 19 having ring-shaped polishing pads 18a and 19a around an upper surface, are arranged on a base stand 7. A rotatable and ascendable-descendable disk chuck 3 to hold a disk 2 to be polished, is journalled to the arm 4, and when the arm 4 is raised and lowered, a pair of upper surface plates 11 and 12 and the disk 2 are raised and lowered by interlocking with each other. Since the disk 2 can be rotated in the inverse direction of the respective surface plates independently of the upper surface plates and the lower surface plates, polishing efficiency is improved, and when rotating speed of the respective surface plates and the disk is set, a regular work trace can be formed on the disk. |
