Ceramic heater made of fused silica glass having roughened surface

摘要

An improvement is proposed in a ceramic heater which is an integral body comprising a flat substrate plate made from an electrically insulating ceramic material, e.g., fused silica glass, and a layer of an electroconductive material formed on one surface of the substrate plate in a pattern of an electric heater element. One of the surfaces of the insulating substrate plate, on which the heater layer is formed, is subjected to a surface roughening treatment, e.g., by sand blasting, prior to the formation of the heater layer so as to be imparted with a specified surface roughness so that the heat generated in the heater layer and transmitted to the other surface as infrared rays is irregularly scattered .