发明名称 SCANNING PROBE MICROSCOPE INTEGRATED WITH OPTICAL MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a microscope which prevents laser light from coming in the eye of an observer when the observer directly observes an object through an eyepiece. SOLUTION: In the scanning probe microscope, an SPM measuring unit 114 is incorporated in an inverted optical microscope 130. The microscope 130 has an objective lens 132, eyepiece 134, and a laser shutter 150 positioned on the optical path for observation between the lens 132 and eyepiece 134. The shutter 150 is opened/closed by the movement of a slider and provided with a switch which detects the opening/closing of the shutter 150. A logic circuit 106 performs arithmetic operation on a switch output signal (a) from the shutter 150 and the output signal (b) of the controller 104 and an LD switch 108 outputs a signal which finally decides the turning on/off of a laser light source 120 based on the output signal (c) of the logic circuit 106.
申请公布号 JPH09166602(A) 申请公布日期 1997.06.24
申请号 JP19950325831 申请日期 1995.12.14
申请人 OLYMPUS OPTICAL CO LTD 发明人 KAMI YOSHIHIRO
分类号 G01B9/04;G01B11/30;G01B21/30;G01N37/00;G01Q10/04;G01Q20/02;G01Q30/02;G01Q90/00;G02B21/00;G06T1/00;H01J37/28;(IPC1-7):G01N37/00 主分类号 G01B9/04
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