Device to automatically and continually analyse liquid samples

摘要

Device to automatically and continually analyse liquid samples by mixing with various reagents with the help of an arrangement of micro-pumps, mixing chambers, reactors and sensors. The micro-pumps (1), mixing chambers (5), reaction channels (8) and connecting channels (14,15,17) are arranged in a common silicon wafer crystal lattice structure of orientation 100, whose structure is introduced by anisotropic etching. The flow cross sections of one or more inlet channels (14) to the pump chamber (13) are different to that of the pump chamber outlet channel (15), and the silicon wafer (2) is sealed by a cover layer (18).