| 摘要 |
PROBLEM TO BE SOLVED: To generate a fast atomic beam with a very small beam diameter with good efficiency by neutralizing an ion beam of a very small size by metallic vapor in the inside of a neutralizing chamber. SOLUTION: A heater 1a of a liquid metal ion source 1 is heated and a metal ion beam 22 is emitted in the vacuum from the tip of the generated molten metal. A neutralizer 10 is so constructed that the beam axis of a beam 22 is adjusted with a d.c. electric field by an XY deflecting system 21 to be introduced into a neutralizing chamber 23 through an upper fine hole 28. The beam 22 comes into contact with the vapor of metal heated to a high temperature by a heater 26 to be neutralized without loss of energy and return to an atom. The atom having the large generated kinetic energy becomes a beam to be emitted from a lower fine hole 29 with a diameter of 0.5mm, and the mixed un-neutralized ion is removed by a deflecting system 24. Only the sub- micron focused fast atom beam 25 is emitted from a lower hole 30 with a diameter of 1mm of an ion removing cover. Accordingly, a fast atom beam with a diameter of 1μm or less can be generated with good efficiency.
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