| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying device the arms of which can receive and deliver substrates over long distances and which is reduced in size. SOLUTION: A sensor 12b is fitted to an arm supporting table 12 at the position of the front end of a substrate 30 when an arm 11a on which the substrate 30 is placed is positioned to a returning position and another sensor 12a is positioned above the arm 11a at the same position. Consequently, the size of a substrate carrying device can be reduced, because the space for projecting the arm supporting table 12 to the position C indicated by the two-dot chain line for fixing the sensor 12b in the conventional substrate carrying device becomes unnecessary. Therefore, the substrate receiving and delivering area of this device becomes wider than that of the conventional device when the strokes ST of arms 11a and Jib are the same as those of the arms of the conventional substrate carrying device. |
