ELECTROSTATIC ATTRACTING ELECTRODE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To easily manufacture electrostatic attracting electrodes which can attract wafers with accuracy even when the diameter of the wafers increases. SOLUTION: After a recessed section in which a second electrode 12 is fitted is provided on a first electrode 11 and an insulating film 3 is formed in the recessed section, the electrode 12 is fitted in the recessed section and the surfaces of the electrodes 11 and 12 are machined so that the surfaces can be flushed with each other. Then an electrostatically attracting film 14 is formed on the surfaces of the electrodes 11 and 12 by thermal spraying and the film 14 is polished to a prescribed thickness. Therefore, the electrodes 11 and 12 can easily attract a wafer 9 having a large diameter.