| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope for objectively judging the degree of deterioration of a probe due to, damage and contamination, etc. SOLUTION: After setting a sample 1a to be measured on a measurement holder 1, a scan controller 4b adjusts the distance between the standard sample 1a and a probe 5b to a specific value via a Z-axis fine-move mechanism 2, places the Z-axis driver 2a under the control of a servo mechanism 7, at the same time drives an XY fine-move mechanism 3 via an XY scanning driver 3a, scans the surface of the sample 1a from a left edge to a right edge, and stores obtained detection data in an image memory 4a. Then, the scan controller 4b scans the sample 1a from a right edge to a left edge and stores obtained detection data in an image memory 4a'. An operation part 4c calculates each square sum of detection data stored at the image memories 4a and 4b, compares the absolute value of the difference of both square sums and a predetermined specific thresholdε, and judges that a probe 5b deteriorated and displays the deterioration of the probe 5b on a monitor 9 when the absolute value of the difference of both square sums is equal to or larger than the predetermined specific thresholdε.
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