| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination of a wafer due to adhesion of dust to the wafer caused by static electricity, by providing an anti-static function to a wafer carrying plate of a wafer transfer machine used for carrying wafers. SOLUTION: A long and narrow plate main body 11 supports and holds a wafer with a distal end portion in its lengthwise direction. A ground wire 16 is provided along the lengthwise direction of the plate main body 11, and a contact spring end 17 at one end of the ground wire 16 is in contact with a wafer 14, while a contact end 18 at the other end of the ground wire 16 is grounded. Ground members 19 and 20 are attached to a base end of the plate main body 11. The base end of the plate main body 11 is supported by the wafer transfer machine via the ground members. Thus, electric charge of the wafer and the plate main body can be prevented. |
