申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
TAKEUCHI, MASAKI, SYNTHETIC TECHNOLOGY LAB., KUBIKI-MURA, NAKAKUBIKI-GUN, NIIGATA 942, JP;ISHIHARA, TOSHINOBU, SYNTHETIC TECHNOLOGY LAB, KUBIKI-MURA, NAKAKUBIKI-GUN, NIIGATA 942, JP;KUBOTA, TOHRU, SYNTHETIC TECHNOLOGY LAB., KUBIKI-MURA, NAKAKUBIKI-GUN, NIIGATA 942, JP;ENDO, MIKIO, SYNTHETIC TECHNOLOGY LAB., KUBIKI-MURA, NAKAKUBIKI-GUN, NIIGATA 942, JP |