| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to execute high-accuracy fine laser beam processing in the case work pieces vary slightly in their shapes with each work piece or the case the work pieces are subjected to high-accuracy fine processing. SOLUTION: This laser beam processing machine has an X-Y table 3 on which the work piece 2 is placed and which is slidable arbitrarily in X-Y directions by a driving mechanism 4, laser beam irradiation sections 5, 6 which irradiate the work piece 2 with the laser beam from a laser oscillator 5 through an optical system 6 to process the work piece and mark detecting sections 7 to 9 which detect the positions of the >=2 alignment marks formed on the work piece 2. These mark detecting sections 7 to 9 successively detect the >=2 alignment marks to make rough adjustment, then successively detect these marks to make fine adjustment. The X-Y table 3 is slid by the driving mechanism 4 in accordance with the results of the detection made by the mark detecting sections 7 to 9 to adjust the alignment until the placing position of the work piece 2 is aligned to the prescribed processing position. |
