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发明名称
摘要
申请公布号	JP2614676(B2)	申请公布日期	1997.05.28
申请号	JP19910105496	申请日期	1991.05.10
申请人		发明人
分类号	C23C16/00;B05D7/24;C23C16/04;G01N27/12;H01L21/312;H01L31/10;H01L51/05;H01L51/30;H01L51/40;H01L51/50;H05B33/10;(IPC1-7):C23C16/00	主分类号	C23C16/00
代理机构		代理人
主权项
地址

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