发明名称 |
METHOD AND APPARATUS FOR HEAT TREATMENT METHOD |
摘要 |
<p>In a heat treatment apparatus, a temperature measuring element is arranged to be movable along an arrangement direction of a large number of objects placed in a process tube. A temperature distribution of a heat treatment area inside the process tube can be continuously measured by this temperature measuring element with high accuracy. As a result, internal temperature control of the process tube can be facilitated with high precision.</p> |
申请公布号 |
KR970008334(B1) |
申请公布日期 |
1997.05.23 |
申请号 |
KR19890001691 |
申请日期 |
1989.02.14 |
申请人 |
TOKYO ELECTRON SAGAMI KK. |
发明人 |
NAKAO, KEN |
分类号 |
G01K1/14;G05D23/22;H01L21/00;(IPC1-7):H01L21/22 |
主分类号 |
G01K1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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