SPUTTERING TITANIUM TARGET AND METHOD FOR PRODUCING THE SAME

摘要

A titanium target for sputtering high in film making efficiency in a contact hole. The crystallization on the target face is caused to be orientated so that the X-ray diffraction strength of the (10 -10) and / or (11 -20) vertical to the close-packed filling face may become 1.1 times or more in a case of the random orientation, and the X-ray diffraction strength of the (0002) parallel to the close-packed filling face may become 1 time or lower in a case of the random orientation. A direction of the spatter grains jumping out of the target face is controlled in a direction vertical to the target face.