| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of transferring cassettes, which utilizes effectively the internal and external spaces of a clean room and can transfer the cassettes safely and at low cost. SOLUTION: This factory is made into a structure, wherein a plurality of storage racks 4 for storing cassettes, which are respective housed with substrates, and automatic warehouses 1a, 1b and 1c having a transfer robot, which is travelled on the ground and performs storage and taking-out of the above cassettes K, are respectively installed in the state corresponding to each of a plurality of manufacturing processes A, B and C for treating the above substrates. In this case, a transfer of the cassettes K between the processes A, B and C is executed within the extent of the width direction of the warehouses 1a, 1b and 1c. |
