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发明名称
METHOD OF REGENERATING CRYOPUMP AND DEVICE FOR REGENERATING THEREOF
摘要
申请公布号
JPH09126125(A)
申请公布日期
1997.05.13
申请号
JP19950333298
申请日期
1995.12.21
申请人
SONY CORP
发明人
SUZUKI KEITA
分类号
G01N27/10;F04B37/08;F04C18/00;H01L21/203;H01L21/31;(IPC1-7):F04B37/08
主分类号
G01N27/10
代理机构
代理人
主权项
地址
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