Electro-magnetic lens, charged particle beam transferring apparatus, and method for manufacturing electro-magnetic lens

摘要

A charged particle beam transferring apparatus includes a pair of electro-magnetic lenses spaced apart in the direction of the optical axis. Each electro-magnetic lens consists of a coil and core made of magnetic material and having two magnetic poles. The core of at least one of the electro-magnetic lenses is made of ferrite. An insulating member supports the two magnetic poles of the core of the at least one of the electro-magnetic lenses between its two magnetic poles.