| 摘要 |
Alignment of a mask, such as a photolithographic mask, to a workpiece, such as a printed circuit board is improved using a frame having sides that are individually thermally expandable. The mask is fabricated to be undersized so that the distance between fiducials on the mask is less than a desired distance, which may be the distance between corresponding fiducials on the workpiece. The mask is mounted on the frame, whereafter at least one side of the frame is heated to expand the side and stretch the mask to achieve the desired interfiducial distance.
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