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发明名称
EPITAXIAL REACTOR APPARATUS AND METHOD
摘要
申请公布号
CA717947(A)
申请公布日期
1965.09.14
申请号
CAD717947
申请日期
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
EDWARD G. GROCHOWSKI;WILLIAM H. WHITE;ROBERT S. SCHWARTZ;MICHELE RANALDI
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