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发明名称
Verfahren zum Betrieb eines Excimerlasers und Fluorversorgungseinrichtung zur Durchführung des Verfahrens
摘要
申请公布号
DE4136272(C2)
申请公布日期
1997.04.17
申请号
DE19914136272
申请日期
1991.11.04
申请人
LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH, 37079 GOETTINGEN, DE
发明人
VOS, FRANK, DR., 37083 GOETTINGEN, DE;BASTING, DIRK, DR., 37079 GOETTINGEN, DE;MELLER, ANTON, PROF. DR., 37085 GOETTINGEN, DE
分类号
C01B7/20;C01G1/06;C01G51/08;H01S3/03;H01S3/095;H01S3/225;(IPC1-7):H01S3/036
主分类号
C01B7/20
代理机构
代理人
主权项
地址
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