发明名称 Vaporiser for semi-conductor production
摘要 Vaporiser consisting of a tube (10), surrounded by a heater (14), which seats a vaporiser body (16) in the form of a pot whose base faces a valve body (26), and its associated closure element (34) which is located in a central recess in the base. The valve body is attached in a sealed, but flexible, manner to a flange (12) of tube (10) and has a central bore which is supplied with fluid through a tube (32).
申请公布号 DE19603127(C1) 申请公布日期 1997.04.10
申请号 DE19961003127 申请日期 1996.01.29
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE 发明人 HACKER, ERWIN, DIPL.-ING., 87600 KAUFBEUREN, DE;KLUMPP, ARMIN, DIPL.-PHYS., 80337 MUENCHEN, DE
分类号 B01D1/00;B01D1/06;B01J4/04;C23C16/448;(IPC1-7):B01D1/00;B01D1/30;B01J4/00 主分类号 B01D1/00
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