发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND ITS PATTERN FORMING METHOD
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive polyimide resin capable of heating treatment at a low temp., having satisfactory film characteristics and excellent in adhesion to a substrate. SOLUTION: This photosensitive resin compsn. contains polyamic acid ester having a structure represented by formula I (where R2 contains one or more kinds of groups represented by formula II, etc., and a group represented by formula III and the contents of the groups represented by the formulae II, III are 30-99mol% and 1-20mol% of R2 , respectively) and having 170-270 deg.C glass transition temp. after heat treatment and a photopolymn. initiator and/or a photosensitizer as essential components.
申请公布号 JPH0990632(A) 申请公布日期 1997.04.04
申请号 JP19950251661 申请日期 1995.09.28
申请人 SUMITOMO BAKELITE CO LTD 发明人 HIRANO TAKASHI
分类号 G03F7/028;C08G73/10;C08L79/08;G03F7/038;H01L21/027;H05K3/06;(IPC1-7):G03F7/038 主分类号 G03F7/028
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