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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0987834(A)
申请公布日期
1997.03.31
申请号
JP19950246413
申请日期
1995.09.25
申请人
SONY CORP
发明人
ICHIKAWA TAKUYA;SEKINO TOMOYUKI
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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