| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy by a method wherein an error is distributed temporarily while keeping the target accuracy of the whole in an error factor, the determination of the value of gate width W and the value of gate length L is repeated so as to reduce distributed values and a function using the distributed values as parameters is obtained when threshold voltage, gate width W and gate length L are dispersed. SOLUTION: Each requirement constant is prepared at a step S314, and an error distribution KVth is determined at a step S302. The maximum value of an aspect ratio is obtained at a step S303. On the other hand, an error distribution Kβis acquired at a step S304, an error KL toΔL is distributed temporarily at a step S305, W and L are obtained and KL is updated, and the graphs of W and L using KL as a parameter are prepared at a step S308. W and L are inscribed in consideration of Ar-max at a step S309 from outputs from the steps S303 and S308, a minimum gate area W×L is acquired and KVth is updated. The operation is repeated, the graph of an area using the error distribution as the parameter is prepared, and the gate area W×L is minimized.
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