| 摘要 |
PROBLEM TO BE SOLVED: To provide a work transfer device capable of accurately transferring a work to a prescribed position and preventing the work from being damaged at the time of its transfer. SOLUTION: An arm 4 provided on Z,θand Y stages 10 to 12 is rotated around a rotational shaft 5. A work 2 grasped by vacuum with a work grasping part 3 is moved to a position just under a reference face 1 fixed to an X stage 13 by the Z,θand Y stages 13, 11, 12 while correcting its position by picture information obtained from an image pickup device 26 and abutted on the reference face 1 by the Z stage 10. When it is detected that the work 2 is abutted thereon by a contactless sensor 9, the Z stage 10 is stopped. Then the work 2 is grasp by vacuum on the reference face 1 and the grasping of the work grasping part 3 is released.
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