发明名称 BETA-SUBSTITUTED ORGANOSILSESQUIOXANES AND USE THEREOF
摘要 <p>Silsesquioxane polymers that are useful for preparing SiO2-rich ceramic coatings are obtained as the polymeric reaction products from the hydrolysis and condensation of organosilanes having a beta -substituted alkyl group. A preferred silsesquioxane polymer is the polymeric reaction product obtained from beta -chloroethyltrichlorosilane. Coating compositions containing such silsesquioxane polymers dissolved in organic solvent may be applied to a substrate and converted to SiO2-rich ceramic thin layers by evaporating the solvent and heating the coated substrate at moderate temperatures.</p>
申请公布号 WO9710282(A1) 申请公布日期 1997.03.20
申请号 WO1996US14553 申请日期 1996.09.11
申请人 GELEST, INC.;UNIVERSITY OF PENNSYLVANIA 发明人 ARKLES, BARRY, C.;BERRY, DONALD, H.;FIGGE, LISA, KIERNAN
分类号 B05D3/02;C08G77/04;C08G77/14;C08G77/24;C09D183/06;C09D183/08;C23C18/12;H01L21/312;(IPC1-7):C08G77/24;C08K5/10;C08K5/07;C08K5/05;C08K5/01;C08K5/02;C08G77/18 主分类号 B05D3/02
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