CANTILEVER WITH INTEGRATED DEFLECTION SENSOR

摘要

A cantilever for scanning probe microscopy and other force of deflection measurements is decribed; said cantilever comprising at least one integrated strain sensing element within a constriction section (62). The cantilever is improved over known cantilevers by reducing the longitudinal extension of the constriction, such that its contribution to the total deflection of the cantilever is reduced. The design of the cantilever is further improved by applying a beam (63) with an essentially triangular cross section in either a vertical or a horizontal plane or both.