SUBSTRATE FIXTURE

摘要

The fixture comprising a first plate (12), a second plate (14) for supporting the substrate (22) during deposition of the material over the substrate, the substrate being supported on a side of the second plate opposite the first plate, a plurality of thermoelectric devices (30) disposed between the first plate and the second plate, the thermoelectric devices being in thermal communication with both the first plate and the second plate, and a device for controlling each of the thermoelectric devices to generate thermal energy sufficient to substantially maintain a desired temperature of the substrate during deposition of the material over the substrate, wherein a portion of the thermal energy is transferred to the substrate by the second plate and a portion of the thermal energy is transferred away from the thermoelectric devices by the first plate.