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发明名称
FORMATION OF BURIED CONDUCTIVE LAYER
摘要
申请公布号
JPH0969522(A)
申请公布日期
1997.03.11
申请号
JP19950224954
申请日期
1995.09.01
申请人
FUJITSU LTD
发明人
OKAMOTO SHIGERU
分类号
H01L23/52;H01L21/285;H01L21/304;H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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