| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave-excited gas laser apparatus which eliminates a mirror for transmission by solving problems that the mirror for transmission is required when high-output laser beam machining is performed by a robot and that the mirror is required to be adjusted fine so as to match the movement of the robot. SOLUTION: A microwave-excited gas laser apparatus is provided with an output mirror 6 which takes out a laser beam, with a final-stage mirror 7 which multiple-amplifies and feeds back the beam together with the output mirror 6, with a main flange 8 which holds the output mirror 6 and with an evacuation block 9 which holds the final-stage mirror 7. An optical resonator is constituted of the output mirror 6 and of the final-stage mirror 7, the optical resonator is constituted on an arm 16a via the main flange 8 and the evacuation block 9, and the arm 16a is used as an optical bench for the optical resonator. Thereby, it is possible to provide a microwave-excited gas laser apparatus which eliminates a mirror for transmission. |
