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发明名称
METHOD FOR CONTROLLING CHEMICAL CONCENTRATION IN PIRANHA CLEANING STEP
摘要
申请公布号
JPH0964005(A)
申请公布日期
1997.03.07
申请号
JP19950230702
申请日期
1995.08.17
申请人
RISOTETSUKU JAPAN KK
发明人
SEKIGUCHI ATSUSHI
分类号
H01L21/308;H01L21/027;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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